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Soft x-rays and extreme ultraviolet radiation principles and applications / David Attwood.

By: Material type: TextTextPublication details: Cambridge ; New York : Cambridge University Press, (c)2000.Description: 1 online resource (xvi, 470 pages) : illustrations (some color)Content type:
  • text
Media type:
  • computer
Carrier type:
  • online resource
ISBN:
  • 9781139648936
Subject(s): Genre/Form: LOC classification:
  • QC482 .S648 2000
Online resources: Available additional physical forms:
Contents:
Introduction -- Radiation and Scattering at EUV and Soft X-Ray Wavelengths -- Wave Propagation and Refractive Index at EUV and Soft X-Ray Wavelengths -- Multilayer Interference Coatings -- Synchrotron Radiation -- Physics of Hot Dense Plasmas -- Extreme Ultraviolet and Soft X-Ray Lasers -- Coherence at Short Wavelengths -- Soft X-Ray Microscopy with Diffractive Optics -- Extreme Ultraviolet and X-Ray Lithography
Review: "This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy."--BOOK JACKET. "The book will be of interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practicing engineers involved in semiconductor fabrication and materials science."--BOOK JACKET.
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Holdings
Item type Current library Collection Call number URL Status Date due Barcode
Online Book (LOGIN USING YOUR MY CIU LOGIN AND PASSWORD) Online Book (LOGIN USING YOUR MY CIU LOGIN AND PASSWORD) G. Allen Fleece Library ONLINE Non-fiction QC482.68 (Browse shelf(Opens below)) Link to resource Available ocn855534552

Includes bibliographies and index.

Introduction -- Radiation and Scattering at EUV and Soft X-Ray Wavelengths -- Wave Propagation and Refractive Index at EUV and Soft X-Ray Wavelengths -- Multilayer Interference Coatings -- Synchrotron Radiation -- Physics of Hot Dense Plasmas -- Extreme Ultraviolet and Soft X-Ray Lasers -- Coherence at Short Wavelengths -- Soft X-Ray Microscopy with Diffractive Optics -- Extreme Ultraviolet and X-Ray Lithography

"This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy."--BOOK JACKET. "The book will be of interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practicing engineers involved in semiconductor fabrication and materials science."--BOOK JACKET.

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