MARC details
| 000 -LEADER |
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| fixed length control field |
02457nam a2200385Ki 4500 |
| 001 - CONTROL NUMBER |
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| control field |
ocn855534552 |
| 003 - CONTROL NUMBER IDENTIFIER |
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| control field |
OCoLC |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
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| control field |
20240726105323.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
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| fixed length control field |
130812s2000 enka ob 001 0 eng d |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
NT |
| Language of cataloging |
eng |
| Description conventions |
rda |
| Transcribing agency |
NT |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9781139648936 |
| Qualifying information |
|
| 050 04 - LIBRARY OF CONGRESS CALL NUMBER |
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| Classification number |
QC482 |
| Item number |
.S648 2000 |
| 049 ## - LOCAL HOLDINGS (OCLC) |
|---|
| Holding library |
NTA |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
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| Personal name |
Attwood, David T. |
| Relator term |
Author |
| 245 10 - TITLE STATEMENT |
|---|
| Title |
Soft x-rays and extreme ultraviolet radiation |
| Remainder of title |
principles and applications / |
| Statement of responsibility, etc. |
David Attwood. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Cambridge ; |
| -- |
New York : |
| Name of publisher, distributor, etc. |
Cambridge University Press, |
| Date of publication, distribution, etc. |
(c)2000. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
1 online resource (xvi, 470 pages) : |
| Other physical details |
illustrations (some color). |
| 336 ## - CONTENT TYPE |
|---|
| Content type term |
text |
| Content type code |
txt |
| Source |
rdacontent |
| 337 ## - MEDIA TYPE |
|---|
| Media type term |
computer |
| Media type code |
c |
| Source |
rdamedia |
| 338 ## - CARRIER TYPE |
|---|
| Carrier type term |
online resource |
| Carrier type code |
cr |
| Source |
rdacarrier |
| 347 ## - DIGITAL FILE CHARACTERISTICS |
|---|
| File type |
data file |
| Source |
rda |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
Includes bibliographies and index. |
| 505 00 - FORMATTED CONTENTS NOTE |
|---|
| Title |
Introduction -- |
| -- |
Radiation and Scattering at EUV and Soft X-Ray Wavelengths -- |
| -- |
Wave Propagation and Refractive Index at EUV and Soft X-Ray Wavelengths -- |
| -- |
Multilayer Interference Coatings -- |
| -- |
Synchrotron Radiation -- |
| -- |
Physics of Hot Dense Plasmas -- |
| -- |
Extreme Ultraviolet and Soft X-Ray Lasers -- |
| -- |
Coherence at Short Wavelengths -- |
| -- |
Soft X-Ray Microscopy with Diffractive Optics -- |
| -- |
Extreme Ultraviolet and X-Ray Lithography |
| 520 1# - SUMMARY, ETC. |
|---|
| Summary, etc. |
"This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy."--BOOK JACKET. "The book will be of interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practicing engineers involved in semiconductor fabrication and materials science."--BOOK JACKET. |
| 530 ## - COPYRIGHT INFORMATION: |
|---|
| COPYRIGHT INFORMATION |
COPYRIGHT NOT covered - Click this link to request copyright permission: |
| Uniform Resource Identifier |
<a href="b">b</a> |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Grenz rays. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Ultraviolet radiation. |
| 650 #4 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Grenz rays |
| General subdivision |
Industrial applications. |
| 650 #4 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Ultraviolet radiation |
| General subdivision |
Industrial applications. |
| 655 #1 - INDEX TERM--GENRE/FORM |
|---|
| Genre/form data or focus term |
Electronic Books. |
| 856 40 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Uniform Resource Identifier |
<a href="https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=510939&site=eds-live&custid=s3260518">https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=510939&site=eds-live&custid=s3260518</a> |
| -- |
Click to access digital title | log in using your CIU ID number and my.ciu.edu password |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Koha item type |
Online Book (LOGIN USING YOUR MY CIU LOGIN AND PASSWORD) |
| DONATED BY: |
|
| VENDOR |
EBSCO |
| Classification part |
QC. |
| PUBLICATION YEAR |
2000 |
| LOCATION |
ONLINE |
| REQUESTED BY: |
|
| -- |
|
| -- |
NFIC |
| Source of classification or shelving scheme |
|
| 994 ## - |
|---|
| -- |
02 |
| -- |
NT |
| 902 ## - LOCAL DATA ELEMENT B, LDB (RLIN) |
|---|
| a |
1 |
| b |
Cynthia Snell |
| c |
1 |
| d |
Cynthia Snell |