| 000 | 02457nam a2200385Ki 4500 | ||
|---|---|---|---|
| 001 | ocn855534552 | ||
| 003 | OCoLC | ||
| 005 | 20240726105323.0 | ||
| 008 | 130812s2000 enka ob 001 0 eng d | ||
| 040 |
_aNT _beng _erda _cNT |
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| 020 |
_a9781139648936 _q((electronic)l(electronic)ctronic)l((electronic)l(electronic)ctronic)ctronic bk. |
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| 050 | 0 | 4 |
_aQC482 _b.S648 2000 |
| 049 | _aNTA | ||
| 100 | 1 |
_aAttwood, David T. _e1 |
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| 245 | 1 | 0 |
_aSoft x-rays and extreme ultraviolet radiation _bprinciples and applications / _cDavid Attwood. |
| 260 |
_aCambridge ; _aNew York : _bCambridge University Press, _c(c)2000. |
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| 300 |
_a1 online resource (xvi, 470 pages) : _billustrations (some color). |
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| 336 |
_atext _btxt _2rdacontent |
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| 337 |
_acomputer _bc _2rdamedia |
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| 338 |
_aonline resource _bcr _2rdacarrier |
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| 347 |
_adata file _2rda |
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| 504 | _a2 | ||
| 505 | 0 | 0 |
_tIntroduction -- _tRadiation and Scattering at EUV and Soft X-Ray Wavelengths -- _tWave Propagation and Refractive Index at EUV and Soft X-Ray Wavelengths -- _tMultilayer Interference Coatings -- _tSynchrotron Radiation -- _tPhysics of Hot Dense Plasmas -- _tExtreme Ultraviolet and Soft X-Ray Lasers -- _tCoherence at Short Wavelengths -- _tSoft X-Ray Microscopy with Diffractive Optics -- _tExtreme Ultraviolet and X-Ray Lithography |
| 520 | 1 | _a"This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy."--BOOK JACKET. "The book will be of interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practicing engineers involved in semiconductor fabrication and materials science."--BOOK JACKET. | |
| 530 |
_a2 _ub |
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| 650 | 0 | _aGrenz rays. | |
| 650 | 0 | _aUltraviolet radiation. | |
| 650 | 4 |
_aGrenz rays _xIndustrial applications. |
|
| 650 | 4 |
_aUltraviolet radiation _xIndustrial applications. |
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| 655 | 1 | _aElectronic Books. | |
| 856 | 4 | 0 |
_uhttps://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=510939&site=eds-live&custid=s3260518 _zClick to access digital title | log in using your CIU ID number and my.ciu.edu password |
| 942 |
_cOB _D _eEB _hQC. _m2000 _QOL _R _x _8NFIC _2LOC |
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| 994 |
_a02 _bNT |
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| 999 |
_c96390 _d96390 |
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| 902 |
_a1 _bCynthia Snell _c1 _dCynthia Snell |
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