TY  - BOOK
AU  - Attwood,David T.
TI  - Soft x-rays and extreme ultraviolet radiation: principles and applications 
SN  - 9781139648936
AV  - QC482 .S648 2000
PY  - 2000///
CY  - Cambridge, New York
PB  - Cambridge University Press
KW  - Grenz rays
KW  - Ultraviolet radiation
KW  - Industrial applications
KW  - Electronic Books
N1  - 2; Introduction --; Radiation and Scattering at EUV and Soft X-Ray Wavelengths --; Wave Propagation and Refractive Index at EUV and Soft X-Ray Wavelengths --; Multilayer Interference Coatings --; Synchrotron Radiation --; Physics of Hot Dense Plasmas --; Extreme Ultraviolet and Soft X-Ray Lasers --; Coherence at Short Wavelengths --; Soft X-Ray Microscopy with Diffractive Optics --; Extreme Ultraviolet and X-Ray Lithography; 2; b
N2  - "This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy."--BOOK JACKET. "The book will be of interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practicing engineers involved in semiconductor fabrication and materials science."--BOOK JACKET
UR  - https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=510939&site=eds-live&custid=s3260518
ER  -